Ironcore Vacuum Linear Motor

Ironless Vacuum Linear Motor

From ITG Linear Motor

ITG’s ironless vacuum linear motors are engineered specifically for ultra-clean, high-vacuum applications achieving outstanding performance even at pressures as low as 10⁻⁸ mbar. These motors deliver precise, frictionless motion while minimizing particle emission and outgassing, making them ideal for sensitive industries like semiconductor, display, scientific research, and aerospace

Ironless, cog-free design

Vacuum-compatible structure

Low outgassing

High thrust and acceleration

Non-contact operation

Everything about Ironless Vacuum Linear Motor

What is an Ironless Vacuum Linear Motor?

An ironless vacuum linear motor is a type of direct-drive motor designed for high-vacuum environments. It features a forceless ironless coil and a magnet track, eliminating cogging and enabling smooth, precise linear motion. These motors are ideal for cleanrooms, semiconductor tools, and scientific instruments that require ultra-low particle generation and minimal outgassing.

How does the Ironless Vacuum Linear Motor work?

The motor operates on the principle of electromagnetic force. The moving coil (forcer), which contains copper windings but no iron, travels along a permanent magnet track. With no mechanical contact or iron core, the motor achieves zero backlash, high acceleration, and silent operation – perfect for vacuum chambers where contamination and vibration must be minimized.