随着高科技应用的发展，对真空解决方案的需求也在增长，以防止化学反应和污染。真空应用包括运动控制、检测、切割、光刻等，均面临运动挑战。
ITG真空无铁芯直线电机的动子线圈和定子轨道经过特殊设计，可在低至10^-8 mbar的高真空环境中使用。
耐久性
可靠性
多功能性
排气性
性能参数
| Parameter | Remarks | Symbol | Unit | ILV59-3 | ILV59-6 | ILV59-12 | |
| Winding Type | S | S | N | S | |||
| Motor type, maximum voltage Phase | 3-phase permanent magnet synchronization | Vac rms (Vdc) | 230 (325) | ||||
| Peak thrust @ 20°C | Magnet@25°C | Fp | N | 102 | 204 | 408 | 409 |
Continuous Thrust Passive Cooling* | @ Tmax | Fc | N | 6 | 11 | 20.4 | 20.4 |
Continuous Thrust Active Cooling* | @ Tmax | Fc | N | 22.4 | 44.8 | 87.7 | 88.7 |
| Maximum Speed*** | @ 300V | Vmax | m/s | 18.3 | 18.3 | 6.8 | 18.3 |
| Motor Thrust Constant | Coils @ 20°C | K | N/Arms | 20 | 20 | 47.8 | 20 |
| Motor Constant | Coils @ 25°C | S | N2/W | 23 | 46 | 89 | 93 |
电气参数
| Parameter | Remarks | Symbol | Unit | ILV59-3 | ILV59-6 | ILV59-12 | |
| Peak Current | Magnet @ 25°C | lp | Arms | 5 | 10 | 8.4 | 20 |
| Continuous Current Passive Cooling | Coils @ Tmax | lc | Arms | 0.3 | 0.55 | 0.42 | 1 |
| Continuous Current Active Cooling | Coils @ Tmax | lc | Arms | 1.1 | 2.2 | 1.8 | 4.35 |
| Back EMF | Bemf | Vdc/m/s | 16 | 16 | 39 | 16 | |
| Resistance Per phase | Coils @ 25°C Ex. Cable | Rph | Ω | 5.8 | 2.9 | 8.5 | 1.4 |
| Induction Per Phase | I<0.6lp | Lph | Mh | 1.9 | 1 | 2.8 | 0.5 |
| Electrical Time Constant | Coil@25°C | τe | Ms | 0.3 | 0.3 | 0.3 | 0.3 |
| Power Loss | All Coils | Pc | W | 25 | 50 | 100 | |
热性能参数
| Parameter | Remarks | Symbol | Unit | ILV59-3 | ILV59-6 | ILV59-12 | |
| The Maximum Permissible Temperature Of The Coil | Tmax | °C | 80 | 80 | 80 | 80 | |
| Thermal R | Coils To Mount. Sfc. | Rth | °C/W | 2.4 | 1.2 | 0.6 | |
| Temp. Sensor | PTC 1kΩ / NTC | ||||||
机械参数
| Parameter | Remarks | Symbol | Unit | ILV59-3 | ILV59-6 | ILV59-12 | |
| Coil Unit Weight | Ex. Cables | W | Kg | 0.15 | 0.26 | 0.5 | |
| Coil Unit Length | Ex. Cables | L | Mm | 79 | 139 | 259 | |
| Motor Attraction Force | Fa | N | 0 | 0 | 0 | ||
| Magnet Pitch | τ | Mm | 30 | ||||
| Power Cable Type | I4*Leadwire AWG20 (1.5mm²), PTFE/ETFE | ||||||
| Sensor Cable Type | I4*Leadwire AWG26 (0.8mm²), PTFE/ETFE | ||||||
设计图
其他参数
