随着高科技应用的发展，对真空解决方案的需求也在增长，以防止化学反应和污染。真空应用包括运动控制、检测、切割、光刻等，均面临运动挑战。
ITG真空无铁芯直线电机的动子线圈和定子轨道经过特殊设计，可在低至10^-8 mbar的高真空环境中使用。
耐久性
可靠性
多功能性
排气性
性能参数
| Parameter | Remarks | Symbol | Unit | ILV91-9 | ILV91-9 |
| Winding Type | N | S | |||
| Motor type, maximum voltage Phase | 3-phase permanent magnet synchronization | Vac rms (Vdc) | 230 (325) | ||
| Peak thrust @ 20°C | Magnet@25°C | Fp | N | 720 | |
Continuous Thrust Passive Cooling* | @ Tmax | Fc | N | 25 | |
Continuous Thrust Active Cooling* | @ Tmax | Fc | N | 120 | |
| Maximum Speed*** | @ 300V | Vmax | m/s | 5 | 12 |
| Motor Thrust Constant | Coils @ 20°C | K | N/Arms | 68 | 27.5 |
| Motor Constant | Coils @ 25°C | S | N2/W | 290 | |
电气参数
| Parameter | Remarks | Symbol | Unit | ILV91-9 | ILV91-9 |
| Peak Current | Magnet @ 25°C | lp | Arms | 10.6 | 26 |
| Continuous Current Passive Cooling | Coils @ Tmax | lc | Arms | 0.37 | 0.92 |
| Continuous Current Active Cooling | Coils @ Tmax | lc | Arms | 1.74 | 4.35 |
| Back EMF | Bemf | Vdc/m/s | 55.5 | 22.5 | |
| Resistance Per phase | Coils @ 25°C Ex. Cable | Rph | Ω | 5.3 | 0.85 |
| Induction Per Phase | I<0.6lp | Lph | Mh | 4.2 | 0.7 |
| Electrical Time Constant | Coil@25°C | τe | Ms | 0.8 | |
| Power Loss | All Coils | Pc | W | 59 | |
热性能参数
| Parameter | Remarks | Symbol | Unit | ILV91-9 | ILV91-9 |
| The Maximum Permissible Temperature Of The Coil | Tmax | °C | 80 | ||
| Thermal R | Coils To Mount. Sfc. | Rth | °C/W | 1 | |
| Temp. Sensor | PTC 1kΩ / NTC | ||||
机械参数
| Parameter | Remarks | Symbol | Unit | ILV91-9 | ILV91-9 |
| Coil Unit Weight | Ex. Cables | W | Kg | 0.7 | |
| Coil Unit Length | Ex. Cables | L | Mm | 280 | |
| Motor Attraction Force | Fa | N | 0 | ||
| Magnet Pitch | τ | Mm | 42 | ||
| Power Cable Type | 4*AWG20 (0.5mm²), PTFE/ETFE | ||||
| Sensor Cable Type | 4*AWG25, PTFE/ETFE | ||||
设计图
其他参数
